The Elionix ELS-G100 electron beam lithography system produces a highly stable beam with a diameter as small 1.8nm, using acceleration voltages of up to 100kV and high beam currents. This allows fine ...

College of Engineering, Swansea University, Bay Campus, Fabian Way, Swansea SA1 8EN, United Kingdom Article Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both ...

† Cavendish Laboratory, University of Cambridge, JJ Thomson Avenue, Cambridge CB3 0HE, U.K. Article Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and ...

Abstract: We introduce an advanced beam steering approach for conformal large-scale radar antenna arrays using Goldberg polyhedral configurations of hexagonal subarrays. Planar array designs face ...

Abstract: Metal grids are used to solve the current spreading problem in coherently coupled implant-defined vertical cavity surface emitting laser (VCSEL) arrays. In-phase mode operation with a ...