Abstract: This paper reports a deep reinforcement learning-based, multi-parameters optimize prediction model for achieving smooth-vertical sidewall profile in deep reactive ion etching (DRIE) process ...

Abstract: A novel microtribometer is developed to characterize microelectromechanical systems (MEMS) sidewall friction with high resolution. The design is based on a rotational grating displacement ...

INDIANAPOLIS — No one is hurt after an SUV crashed through an apartment wall on the north side of Indianapolis Saturday afternoon. According to a social media post by the Indianapolis Fire Department, ...